AlN Template

AlN Template
Image Series Name Parts Number Size(mm3) Spec-sheet
Epi Wafer AlN 2" (50.8㎜)
Thickness (Included substrate)
430㎛±15㎛
Thickness (Included substrate)
430㎛±15㎛
Structure
AlN / Sapphire substrate
Characteristics (at 25℃)
Parameter Typ. Test Conditions
Crack Free AlN Surface Area Diameter >44mm  
Thickness Thickness <3㎛  
XRD (002) <250 arcsec Panalytical
HRXRD
(102) <400 arcsec
RMS 5 ㎛ * 5 ㎛ 1 nm