| Characteristics (at 25℃) | |||
| Parameter | Typ. | Test Conditions | |
| PL measurement | Peak wavelength | 510㎚±10㎚ | Accent RPM2000 - Laser : 266nm Nd-YG - 3mm Edge Exclude | 
| Uniformity STD | <3% | ||
| FWHM | <100㎚ | ||
| FWHM STD | <20% | ||
| Thickness | Thickness | 4.8㎛+/-10% | |
| Thickness STD | <10% | ||
| XRD | (002) | N/A | Panalytical HRXRD | 
| (102) | N/A | ||
| Hall | Carrier Concentration | N/A | Accent HL5500 | 
| Mobility | N/A | ||
| Doping material | Si | used | - |