Characteristics (at 25℃) | |||
Parameter | Typ. | Test Conditions | |
PL measurement | Peak wavelength | 362nm±2nm | Accent RPM2000 - Laser : 266nm Nd-YG - 3mm Edge Exclude |
Uniformity STD | <3% | ||
FWHM | <10㎚ | ||
FWHM STD | <3% | ||
Thickness | Thickness | 2㎛+/-10% | |
Thickness STD | <10% | ||
XRD | (002) | <350 arcsec | Panalytical HRXRD |
(102) | <450 arcsec | ||
Hall | Carrier Concentration | < -1×1017 /㎝ | Accent HL5500 |
Mobility | >200 ㎠/V·sec | ||
Doping material | Si | N/A | - |