| Characteristics (at 25℃) | |||
| Parameter | Typ. | Test Conditions | |
| PL measurement | Peak wavelength | 362nm±2nm | Accent RPM2000 - Laser : 266nm Nd-YG - 3mm Edge Exclude | 
| Uniformity STD | <3% | ||
| FWHM | <10㎚ | ||
| FWHM STD | <3% | ||
| Thickness | Thickness | 2㎛+/-10% | |
| Thickness STD | <10% | ||
| XRD | (002) | <350 arcsec | Panalytical HRXRD | 
| (102) | <450 arcsec | ||
| Hall | Carrier Concentration | < -1×1017 /㎝ | Accent HL5500 | 
| Mobility | >200 ㎠/V·sec | ||
| Doping material | Si | N/A | - |