Characteristics (at 25℃) | |||
Parameter | Typ. | Test Conditions | |
ment | Peak wavelength | 362nm±2nm | Accent RPM2000 - Laser : 266nm Nd-YG - 3mm Edge Exclude |
Uniformity STD | <3% | ||
FWHM | <10㎚ | ||
FWHM STD | <3% | ||
Thickness | Thickness | 0.8㎛+/-10% | |
Thickness STD | <10% | ||
XRD | (002) | N/A | Panalytical HRXRD |
(102) | N/A | ||
Hall | Carrier Concentration | N/A | Accent HL5500 |
Mobility | N/A | ||
Doping material | Si | N/A | - |
Mg | used |